• Accelerometer, gyroscope
• Sensing in harsh environment
• Optical scanner
• Filter for extreme ultra violet (EUV) light source
• Massive parallel electron beam exposure system
• Integrated MEMS
• Fabrication technologies

MEMS（micro electro mechanical systems）are also called "Micro systems" and are used in many systems as input or output for user interface. Subjects studied in our laboratory are accelerometers and gyroscopes for smart phones,
sensing technologies in harsh environment and optical scanners for automobile, filter for extreme ultra violet (EUV) light source and active matrix electron source array for massive parallel electron beam exposure system and basic technologies as integrated MEMS and fabrication technologies. We are pursuing collaboration with industry in collaboration, technical support and access to our facility, and international collaboration as well.